All Categories

History

  1. Metoree
  2. Stages
  3. Piezo Stages
  4. Piezo stage Z axis standard model (THK PRECISION CO.,LTD.)
Piezo stage Z axis standard model-PSVH35-006U
Piezo stage Z axis standard model-THK PRECISION CO.,LTD.

Piezo stage Z axis standard model
THK PRECISION CO.,LTD.

About This Product

Basic series of piezo stages with a wide range of strokes from 1-axis to 3-axis integrated types

■Performance classification using two mechanisms

It is classified into "direct drive mechanism" which has high resonance frequency and emphasizes high-speed response, and "displacement magnification mechanism" which ensures stroke.

■Direct drive mechanism

- A mechanism in which the piezoelectric element directly moves the moving table. - Excellent resolution and responsiveness by suppressing the stroke. ・High rigidity allows stable positioning even under heavy loads.

■Displacement magnification mechanism

- Equipped with a mechanism that mechanically amplifies the expansion of the piezoelectric element. ・Depending on the magnification ratio, you can obtain a stroke that is several times to more than ten times that of direct drive. ・Position repeatability is maintained through feedback control using the built-in displacement sensor.

■Product application examples

・Semiconductor, FPD inspection equipment ・HDD tester ・Laser optical system alignment ・Interference equipment ・Analytical equipment ・Nanometer positioning

  • Product

    Piezo stage Z axis standard model

Share this product


20+ people viewing

Last viewed: 7 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Piezo stage Z axis standard model

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Piezoelectric capacitance Main body Repeated positioning accuracy Load capacity
Piezo stage Z axis standard model-Part Number-PSVH35-006U

PSVH35-006U

Available upon quote

・6μm when closed
・8μm when open

1"/2"/1

0.10%

・3,500Hz at 0g load
・750Hz at 100g load

Capacitive displacement sensor

1nm

0.02μm/N

0.7μF

・Weight 70g
・Material Aluminum
・Surface treatment: white alumite

±1nm

10N

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Piezo stage-Optoscience Co., Ltd.

Piezo stage

Optoscience Co., Ltd.

80+ people viewing

Last viewed: 7 hours ago

Response time: 44.82 hours

Piezo Stages
Mechanics High-precision thin piezo stage 3-axis piezo stage series/BIO3/LT3-Tokyo Instruments, Inc

Mechanics High-precision thin piezo stage 3-axis piezo stage series/BIO3/LT3

Tokyo Instruments, Inc

80+ people viewing

Response time: 24.13 hours

Piezo Stages

2 models listed

Microscope piezo positioning stage P79.XYZ50S-B2-Wired Co., Ltd.

Microscope piezo positioning stage P79.XYZ50S-B2

Wired Co., Ltd.

40+ people viewing

Last viewed: 5 minutes ago

Piezo Stages

2 models listed

Low temperature non-magnetic piezo positioning stage P13A.XYZ80K-Wired Co., Ltd.

Low temperature non-magnetic piezo positioning stage P13A.XYZ80K

Wired Co., Ltd.

50+ people viewing

Piezo Stages

2 models listed

Piezo positioning stage XYZ 3-axis stroke Max. 100μm XD107 series XD107.XY100Z20S-Wired Co., Ltd.

Piezo positioning stage XYZ 3-axis stroke Max. 100μm XD107 series XD107.XY100Z20S

Wired Co., Ltd.

50+ people viewing

Last viewed: 7 minutes ago

Piezo Stages

2 models listed

Cryogenic vacuum non-magnetic piezo positioning stage XD106 series XD106.XYZ200K-Wired Co., Ltd.

Cryogenic vacuum non-magnetic piezo positioning stage XD106 series XD106.XYZ200K

Wired Co., Ltd.

40+ people viewing

Piezo Stages

2 models listed

Piezo positioning stage P15.XYZ300S-C2-Wired Co., Ltd.

Piezo positioning stage P15.XYZ300S-C2

Wired Co., Ltd.

40+ people viewing

Piezo Stages

2 models listed

Low temperature vacuum piezo positioning stage P12B.XYZ100S-Wired Co., Ltd.

Low temperature vacuum piezo positioning stage P12B.XYZ100S

Wired Co., Ltd.

50+ people viewing

Last viewed: 4 minutes ago

Piezo Stages

2 models listed

Piezo positioning stage for microscope P79.XYZ50S-Wired Co., Ltd.

Piezo positioning stage for microscope P79.XYZ50S

Wired Co., Ltd.

60+ people viewing

Piezo Stages

2 models listed

K Piezo positioning stage P12.XY500Z800S-Wired Co., Ltd.

K Piezo positioning stage P12.XY500Z800S

Wired Co., Ltd.

50+ people viewing

Piezo Stages

2 models listed

Piezo positioning stage (enlargement mechanism type) P12A.XY200Z100 series P12A.XY200Z100S-Wired Co., Ltd.

Piezo positioning stage (enlargement mechanism type) P12A.XY200Z100 series P12A.XY200Z100S

Wired Co., Ltd.

60+ people viewing

Piezo Stages

2 models listed

Piezo positioning stage 300μm P15XYZ P15.XY100S-C1-Wired Co., Ltd.

Piezo positioning stage 300μm P15XYZ P15.XY100S-C1

Wired Co., Ltd.

50+ people viewing

Piezo Stages

2 models listed

See More Piezo Stages Products

Other products of THK PRECISION CO.,LTD.

Reviews shown here are reviews of companies.

Piezo stage XYZ axis aperture model-THK PRECISION CO.,LTD.

Piezo stage XYZ axis aperture model

THK PRECISION CO.,LTD.

10+ people viewing

Piezo Stages

2 models listed

Piezo driver-THK PRECISION CO.,LTD.

Piezo driver

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 18 hours ago

Piezo Drivers
Piezo stage rotation type-THK PRECISION CO.,LTD.

Piezo stage rotation type

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 21 hours ago

Rotary Tables

2 models listed

Piezo motor stage Linear system X-axis stage-THK PRECISION CO.,LTD.

Piezo motor stage Linear system X-axis stage

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 9 hours ago

Piezo Stages

3 models listed

Piezo stage X-axis standard model-THK PRECISION CO.,LTD.

Piezo stage X-axis standard model

THK PRECISION CO.,LTD.

20+ people viewing

Piezo Stages

3 models listed

Piezo stage gonio type-THK PRECISION CO.,LTD.

Piezo stage gonio type

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 21 hours ago

Rotary Tables

2 models listed

Piezo motor stage Linear system XY axis stage with opening-THK PRECISION CO.,LTD.

Piezo motor stage Linear system XY axis stage with opening

THK PRECISION CO.,LTD.

10+ people viewing

Piezo Stages

3 models listed

Piezo stage X-axis high durability model-THK PRECISION CO.,LTD.

Piezo stage X-axis high durability model

THK PRECISION CO.,LTD.

10+ people viewing

Piezo Stages

3 models listed

Piezo stage tilt (+Z) type-THK PRECISION CO.,LTD.

Piezo stage tilt (+Z) type

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 8 minutes ago

Rotary Tables

2 models listed

Piezo motor stage Linear system Z-axis stage-THK PRECISION CO.,LTD.

Piezo motor stage Linear system Z-axis stage

THK PRECISION CO.,LTD.

20+ people viewing

Piezo Stages

3 models listed

Piezo stage X-axis strain gauge general-purpose model-THK PRECISION CO.,LTD.

Piezo stage X-axis strain gauge general-purpose model

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 7 hours ago

Piezo Stages

3 models listed

Piezo stage for optical mirror alignment-THK PRECISION CO.,LTD.

Piezo stage for optical mirror alignment

THK PRECISION CO.,LTD.

20+ people viewing

Last viewed: 8 minutes ago

Piezo Stages

2 models listed


View more products of THK PRECISION CO.,LTD.

About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

See More

  • Japan

Related search keywords

Piezo Stages
Piezo Stages　THK PRECISION CO.,LTD.
THK PRECISION CO.,LTD.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2025 Metoree