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  4. Piezo stage X-axis aperture model (THK PRECISION CO.,LTD.)
Piezo stage X-axis aperture model-PK1L40-020U-N
Piezo stage X-axis aperture model-THK PRECISION CO.,LTD.

Piezo stage X-axis aperture model
THK PRECISION CO.,LTD.

About This Product

This is a lineup that has an opening (transmission hole) in the center of the movable table. Suitable for laser transmission, microscopic observation in combination with microscopes and analytical instruments, and high-precision mapping measurements.

■From compact to large opening

We have a wide range of types, from compact aperture types suitable for small devices to wide-opening types that can align large panel boards.

■Smooth and accurate scanning

High-precision feedback control enables highly reliable operation according to command signals.

■Product application examples

・Scanning probe microscope ・Microscope sample table ・Spectral analysis equipment ・Semiconductor, FPD related equipment ・Exposure equipment ・Mapping measurement

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    Piezo stage X-axis aperture model

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1 Models of Piezo stage X-axis aperture model

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Resonant frequency Piezoelectric capacitance Main body Load capacity
Piezo stage X-axis aperture model-Part Number-PK1L40-020U-N

PK1L40-020U-N

Available upon quote

25μm when open

1"/1"/1

・6,600Hz at 0g load
・2,000Hz at 100g load

2.15μF

・Weight 60g
・Material Aluminum
・Surface treatment: black alumite

5N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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Piezo Stages　THK PRECISION CO.,LTD.
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