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  4. CMP equipment for research and development (desktop type) (Wrap Japan Co., Ltd.)
CMP equipment for research and development (desktop type)-LM-15ｰSⅠ
CMP equipment for research and development (desktop type)-Wrap Japan Co., Ltd.

CMP equipment for research and development (desktop type)
Wrap Japan Co., Ltd.

Wrap Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

23.2hours

Relatively Fast Response

About This Product

We offer a range of high-performance model desktop-type compact CMP equipment to large-scale CMP equipment that is ideal for research, development, and production applications. In addition, the small desktop CMP equipment has the same processing element functions as medium and large-sized CMP equipment, making it useful for research and development. I am writing this article for [Precision Polishing for High Added Value] published by Nikkan Kogyo Shimbun.

■Features

It is ideal as research and development equipment for CMP processing of small-diameter compound semiconductor wafers, CMP slurry, pads, diamond dressers, etc. The processing head is available in 1-axis type and 2-axis type, and the device is equipped with oscillation of the processing head, forced drive drive, precision pressure control using a low-friction cylinder, and other step recipes. In addition to the vacuum type, back type, and center pressure type, many processing heads can be replaced with a single touch. This is a small desktop CMP device that includes many mechanical elements of mass-produced CMP devices.

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    CMP equipment for research and development (desktop type)

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1 Models of CMP equipment for research and development (desktop type)

Image Part Number Price (excluding tax) Oscillation drive Number of slurry supply systems Plate cooling mechanism Plate rotation speed Plate diameter Correction ring diameter Control method Pressure method Forced drive drive Required power supply Operation panel Equipment dimensions Weight
CMP equipment for research and development (desktop type)-Part Number-LM-15ｰSⅠ

LM-15ｰSⅠ

Available upon quote

1 axis

1~3 strains

×

5rpm~240rpm

Φ380

Φ6 inch

PLC sequence

Pressurized cylinder

1 axis

200V 50/60Hz

Touch panel

W650×D620×H650

165kg

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About Company Handling This Product

Wrap Japan Co., Ltd.

Response Rate

100.0%

Response Time

23.2hrs

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Wrap Japan Co., Ltd.

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