Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-α-100
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Patent equipment Co., Ltd.

Excellent vibration insulating characteristics Active removal / micro -vibration control device α series
Patent equipment Co., Ltd.


About This Product

Feature ■ Excellent vibration insulating characteristics Feedback control and feed forward control demonstrate outstanding and stable insulating performance. ■ Fast and accurate position control With a high -precision acceleration sensor and a displacement sensor, the impact is instantaneously detected and accurate position restoration is realized. ■ Keeps high duties We will continue to maintain good performance even if there is a big impact on the drive system due to an earthquake or 2G operation. ■ Advantages of "air control" of the α series ・ Excellent vibration insulation characteristics from low frequencies ・ Easy to support static load ・ Easy position and posture control ・ Large stroke ・ Do not creep ・ Do not generate heat ・ There is no leaked magnetic flux ■ Specifications of the device ・ Mine vibration control technology of the α series according to the request ・ L type: device that emphasizes vibration performance (devices used for research and development such as SEM / AFM) ・ M type: Devices that require vibration / vibration control performance (standard dislike device, etc.) ・ H type: Devices that emphasize vibration control performance (high -speed processing equipment, inspection devices, etc.)

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    Excellent vibration insulating characteristics Active removal / micro -vibration control device α series

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9 Models of Excellent vibration insulating characteristics Active removal / micro -vibration control device α series

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Product Image Part Number Price (excluding tax) Design tolerance 1 unit External dimensions W✕d Training performance separately in place height L height l Training performance separately sitting height h height h Training performance separately sitting height m M Unit mass
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-100

α-100

Available upon quote 180kgf 234✕180mm 238mm 168mm 168mm L: 10.1kg M: 8.6kg H: 8.9kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-140

α-140

Available upon quote 400kgf 268✕253mm 238mm 168mm 168mm L: 17.3kg M: 15.2kg H: 15.7kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-200

α-200

Available upon quote 750kgf 328✕313mm 238mm 168mm 168mm L: 21.4kg M: 18.4kg H: 19.4kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-201

α-201

Available upon quote 740kgf 260✕260mm 259mm 204mm 204mm 16kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-202

α-202

Available upon quote 1,300kgf 260✕260mm - 259mm 259mm 21kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-203

α-203

Available upon quote 1,800kgf 260✕260mm - 314mm 314mm 26kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-331

α-331

Available upon quote 2,000kgf 400✕400mm 298mm 262mm 262mm 72kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-332

α-332

Available upon quote 3,900kgf 400✕400mm 403mm 333mm 333mm 88kg
Excellent vibration insulating characteristics Active removal / micro -vibration control device α series-Part Number-α-333

α-333

Available upon quote 5,800kgf 400✕400mm 508mm 404mm 404mm 100kg

Click on the part number for more information about each product

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