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  2. Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A (Fuji Inback Co., Ltd.)
Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A-PALS-200A
Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A-Fuji Inback Co., Ltd.

Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A
Fuji Inback Co., Ltd.

About This Product

■Summary

The PALS device is a Positron Annihilation Lifetime Spectroscopy (PALS) device that can measure the size of pores on the order of atoms to nanometers that exist within thin film materials. The PALS device shoots positrons, which are the antiparticles of electrons, into materials and measures the time (lifetime) it takes for the positrons to annihilate with the electrons in the materials. Positrons are captured by vacancies in materials where atoms have escaped, and their annihilation lifetime becomes longer depending on the vacancy size. Using this property, it is possible to determine the presence or absence of vacancy defects at the atomic level within the material and the size of the vacancies. The PALS measurement method has been used for a long time to analyze vacancy defects in metals, semiconductors, etc., but the conventional measurement method directly uses high-energy positron beams (>100keV) obtained from radioactive isotopes, so it was only possible to analyze deep parts (~0.1mm) of thick samples. In recent years, a depth-variable PALS measurement method (pulsed beam method) using a monochromatic low-energy positron beam has been developed, making it possible to analyze vacancies limited to a specific depth region (such as a thin film on a substrate) near the surface of materials such as polymeric functional films such as separation membranes (RO membranes) and gas barrier membranes, and low-k, high-k, and Cu interconnects. However, its use has been limited to large facilities that use accelerators to generate positrons. The "PALS device" uses the radioactive isotope Na-22 as a positron source. A low-speed positron beam made monochromatic using a high-efficiency moderator is shortened to a pulse width of 250 picoseconds or less using a chopper and buncher, and then enters the sample. The positron lifetime is measured from the difference between the time the positron pulse enters the sample and the time of the gamma rays emitted when the positrons annihilate in the sample. By controlling the energy of the positron beam, it is possible to change the depth at which the positrons are implanted into the sample and selectively measure vacancies contained in a region at a specific depth near the surface of a thin film material, etc.

■Features

・Small general-purpose PALS device equipped with automatic measurement function as standard ・Comes with analysis software that anyone can easily operate ・Measurement of atomic vacancies to nano vacancies in thin film materials ・Measure the surface of the material to several μm with variable depth using pulsed beam method ・Low damage, non-destructive measurement ・5 sample installation/fully automatic measurement

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    Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A

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1 Models of Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A

Image Part Number Price (excluding tax) Γ-ray count rate Analysis depth Time resolution Measurement method Measurement time Measuring hole size Device size Positron beam energy Positron source
Pulsed beam positron lifetime measurement device (PALS device) Measures atomic vacancies to nanovacancies in thin film materials PALS-200A-Part Number-PALS-200A

PALS-200A

Available upon quote

＞2,000cps@0.5GBq

Material surface ~ several μm

＜250ps

Pulsed beam positron lifetime measurement method

1 spectrum <0.5hr

Atomic vacancy (<0.3nm) ~Nanovacancy (<10nm)

2.0m (L) x0.7m (D) x1.5m (H)

0.5~20keV (variable)

Na-22 sealed source (up to 1GBq)

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Fuji Inback Co., Ltd.

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