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  2. Purification Equipment
  3. Draft Chambers
  4. Clean Blaster CS-750 (Fuji Inback Co., Ltd.)
Clean Blaster CS-750-CS-750
Clean Blaster CS-750-Fuji Inback Co., Ltd.

Clean Blaster CS-750
Fuji Inback Co., Ltd.

About This Product

■Clean Blaster

"Clean Blaster" was developed as a device for cleaning semiconductor manufacturing equipment by applying the principle of sandblasting. Utilizing the property of polishing metal surfaces by jetting abrasive material from the tip of the blast nozzle with high-pressure air, it is possible to safely clean parts of ion implantation, CVD, sputtering, vapor deposition equipment, etc. in a short time. All Clean Blaster models are designed with the following considerations for clean environments and workers to ensure safety for people and the environment.

■Summary

・Double local exhaust structure reduces external dust generation to the utmost. The redundant local exhaust system prevents not only the dust generated in the blast chamber but also the heat generated by the dust generated from the motor and electrical equipment inside the equipment from leaking to the outside. ・The clean blaster has a load lock mechanism with a spare chamber. The preliminary room is a closed draft chamber where post-processing of workpieces after blasting work can be done. In addition, the blast chamber and preliminary chamber are separated by a shutter with a gate valve structure. ・The closed hood structure allows you to work without directly touching workpieces contaminated with toxic substances such as As and P. ・Operating costs are kept low because the abrasive material is circulated. Additionally, cutting dust is collected in a tank, making it easy to dispose of. ・Since it is a completely dry method, there is no need to treat waste liquids such as water, acids, and chemicals. -Easy to maintain and manage equipment.

■Features

The CS-750 was developed with the concept of being simpler and more compact while retaining the basic performance of the CS-801. CS-750, with its simple structure, is a basic model of a clean blaster that eliminates expansion functions and reduces product costs. - Two-chamber structure prevents dust from emitting outside during work. - Abrasive material will not be sprayed while the interlock is activated. ・A pulse air jet method is used for filter cleaning of the dust collector. Performs automatic cleaning before starting work.

■Applications

・Ion source of ion implanter ・Other small parts ・Jig cleaning

  • Product

    Clean Blaster CS-750

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1 Models of Clean Blaster CS-750

Image Part Number Price (excluding tax) Work size Compressed air Paint color Exhaust Abrasive material Equipment dimensions Weight Power capacity Power supply voltage
Clean Blaster CS-750-Part Number-CS-750

CS-750

Available upon quote

H350×D450×L500

450L/min at 5kg/cm²

7.5Y91 smooth

6mm/m in

#80~#200

W1,600×D1,050×H2,000

350kg

6A

AC100V 50/60Hz

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About Company Handling This Product

Fuji Inback Co., Ltd.

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