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  4. Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series (Fuji Inback Co., Ltd.)
Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series-A4XN series
Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series
Fuji Inback Co., Ltd.

About This Product

■Application

·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED

■Features

With all the technical advantages of the A4H and A4X series, the A4XN series features a nickel coating on all parts that come into contact with the process gas for added corrosion resistance. Significantly increases lifespan in highly corrosive applications such as polyetching compared to A4H and A4X models. Based on energy-efficient multi-stage Roots technology, the A4XN series meets the demands of different pumping speeds from 600 to 2,900 m3/h, designed for the most corrosive applications.

  • Product

    Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series

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1 Models of Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series

Image Part Number Price (excluding tax)
Dry pump (multi-stage roots type) Extremely Duty Applications A4XN series-Part Number-A4XN series

A4XN series

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Fuji Inback Co., Ltd.

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