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  4. Dry pump (multi-stage roots type) Harsh Duty Applications A4X series (Fuji Inback Co., Ltd.)
Dry pump (multi-stage roots type) Harsh Duty Applications A4X series-A4X series
Dry pump (multi-stage roots type) Harsh Duty Applications A4X series-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Harsh Duty Applications A4X series
Fuji Inback Co., Ltd.

About This Product

■Application

·etching ・PECVD ・SACVD ・ALD ・Solar power generation ·LED

■Features

A4H series dry pumps have high gas throughput and improved powder tolerance, making them ideal for demanding processes in the semiconductor and coatings industries. Equipped with temperature control features that cover low and high operating temperatures to prevent by-product build-up and cracking. The pump complies with Semi S2 and UL61010 standards. With energy-efficient multi-stage roots technology and high-efficiency motors, the A4 series delivers power savings in process operations. Combined with the idle mode function and rotation speed adjustment function, it also contributes to reducing operating costs.

  • Product

    Dry pump (multi-stage roots type) Harsh Duty Applications A4X series

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1 Models of Dry pump (multi-stage roots type) Harsh Duty Applications A4X series

Image Part Number Price (excluding tax)
Dry pump (multi-stage roots type) Harsh Duty Applications A4X series-Part Number-A4X series

A4X series

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Fuji Inback Co., Ltd.

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