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  4. Dry pump (multi-stage roots type) Harsh Duty Applications ADH series (Fuji Inback Co., Ltd.)
Dry pump (multi-stage roots type) Harsh Duty Applications ADH series-ADH series
Dry pump (multi-stage roots type) Harsh Duty Applications ADH series-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Harsh Duty Applications ADH series
Fuji Inback Co., Ltd.

About This Product

■Application

・ALD ・Epitaxial growth ・EUV ・Solar power generation (a-Si, µSi PECVD, etc.) ・LED (MOCVD GaN etc.)

■Features

One of the biggest advantages of the ADH series is its fast hydrogen pumping speed. This allows for faster chamber evacuation between process steps. Due to their high permissible flow rates, ADH pumps are suitable for the most demanding process specifications. Thanks to the optimized design, the pump offers the best power consumption on the market at this level of pump performance. The pump is equipped with dual temperature-controlled water cooling circuits and an integrated hot N2 purge to prevent powder buildup and condensation. Also, the powerful motor can tolerate large amounts of powder and has good restart ability. The ADH series' specialized design and materials allow it to handle the high internal pressure stresses inside the pump, ensuring the highest level of safety in applications involving explosive gases such as hydrogen and silane.

  • Product

    Dry pump (multi-stage roots type) Harsh Duty Applications ADH series

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1 Models of Dry pump (multi-stage roots type) Harsh Duty Applications ADH series

Image Part Number Price (excluding tax)
Dry pump (multi-stage roots type) Harsh Duty Applications ADH series-Part Number-ADH series

ADH series

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