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  4. Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series (Fuji Inback Co., Ltd.)
Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series-A3P series
Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series
Fuji Inback Co., Ltd.

About This Product

■Application

·etching ・Implant ・PVD

■Features

A3P series dry pumps have an internal structure that is resistant to corrosive gases and are equipped with a temperature sensor and inert gas flushing. It has high reliability in medium-load processes, and features low noise and low vibration. It also complies with CE and Semi S2 standards and is suitable for use in clean rooms.

  • Product

    Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series

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1 Models of Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series

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Dry pump (multi-stage roots type) Medium Corrosive Applications A3P series-Part Number-A3P series

A3P series

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Fuji Inback Co., Ltd.

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