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Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L-A100L
Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L
Fuji Inback Co., Ltd.

About This Product

■Application

・Load lock chamber ・Transfer chamber ・Semiconductor manufacturing

■Features

Designed to be installed directly on the tool or factory subfloor, the A100L/A200L series dry pumps allow for frequent, high-speed pump down cycles. Ideal for load lock and transfer chamber applications as well as other non-corrosive applications. The lineup includes the 200 m3/h class A200L and the 100 m3/h class A100L, supporting all types of high-throughput applications.

  • Product

    Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L

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1 Models of Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L

Image Part Number Price (excluding tax)
Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L-Part Number-A100L

A100L

Available upon quote

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Fuji Inback Co., Ltd.

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