All Categories

History

  1. Metoree
  2. Pumps
  3. Vacuum Pumps
  4. Turbomolecular pump (magnetic levitation method) ATH-M/ATP series (Fuji Inback Co., Ltd.)
Turbomolecular pump (magnetic levitation method) ATH-M/ATP series-ATH500M
Turbomolecular pump (magnetic levitation method) ATH-M/ATP series-Fuji Inback Co., Ltd.

Turbomolecular pump (magnetic levitation method) ATH-M/ATP series
Fuji Inback Co., Ltd.

About This Product

■Application

・Glass coating ・Semiconductor process ・Flat panel display manufacturing (LED/OLED) ・Load lock application ・Solar power generation

■Features

The ATH M-Series and ATP-Series turbo pumps are not just magnetically levitated; active 5-axis magnetic bearings monitor rotor position and control deviations from correct position in real time. High-quality bearing technology provides maximum long-term stability, reliability, and quietness. This bearing technology and high vacuum pump process equipment make the ATH M and ATP series the benchmark for high performance turbo pumps in semiconductor manufacturing, thin film and glass coating, and many other industrial and R&D applications.

  • Product

    Turbomolecular pump (magnetic levitation method) ATH-M/ATP series

Share this product


20+ people viewing

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Turbomolecular pump (magnetic levitation method) ATH-M/ATP series

Image Part Number Price (excluding tax)
Turbomolecular pump (magnetic levitation method) ATH-M/ATP series-Part Number-ATH500M

ATH500M

Available upon quote

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Diaphram type MF-5 vacuum pump-Mitsukai Seisakusho Co., Ltd.

Diaphram type MF-5 vacuum pump

Mitsukai Seisakusho Co., Ltd.

360+ people viewing

Last viewed: 2 hours ago

Response time: 44.94 hours

Vacuum Pumps

3 models listed

Vacuum pump R5 RA series 0025-BUSCH VACUUM SOLUTIONS

Vacuum pump R5 RA series 0025

BUSCH VACUUM SOLUTIONS

5.0

950+ people viewing

Last viewed: 7 hours ago

Response time: 51.86 hours

Vacuum Pumps

6 models listed

Turbo molecular pump UTM-MI series-Sanko Ematech Co., Ltd.

Turbo molecular pump UTM-MI series

Sanko Ematech Co., Ltd.

5.0

750+ people viewing

Last viewed: 2 hours ago

Response time: 32.46 hours

Vacuum Pumps

20 models listed

MDV-RA-63-100-Maki Kogyo Co., Ltd.

MDV-RA-63-100

Maki Kogyo Co., Ltd.

340+ people viewing

Response time: 28.52 hours

Vacuum Pumps

3 models listed

Screw type dry vacuum pump MS-ULVAC, Inc

Screw type dry vacuum pump MS

ULVAC, Inc

140+ people viewing

Last viewed: 13 hours ago

Response time: 73.88 hours

Vacuum Pumps

4 models listed

Diafrum type MF-5D vacuum pump-Mitsukai Seisakusho Co., Ltd.

Diafrum type MF-5D vacuum pump

Mitsukai Seisakusho Co., Ltd.

400+ people viewing

Last viewed: 12 hours ago

Response time: 44.94 hours

Vacuum Pumps

6 models listed

Vacuum pump R5 RA series 0040-BUSCH VACUUM SOLUTIONS

Vacuum pump R5 RA series 0040

BUSCH VACUUM SOLUTIONS

5.0

1230+ people viewing

Last viewed: 51 minutes ago

Response time: 51.86 hours

Vacuum Pumps

6 models listed

Low noise vacuum pump Un-400V 680mmHG/325LPM-UNI-CROWN CO., LTD.

Low noise vacuum pump Un-400V 680mmHG/325LPM

UNI-CROWN CO., LTD.

350+ people viewing

Last viewed: 22 hours ago

Vacuum Pumps

3 models listed

Oil rotary type medium-sized EJGO controller equipped EOSi oil seal type screw vacuum pump-Edwards

Oil rotary type medium-sized EJGO controller equipped EOSi oil seal type screw vacuum pump

Edwards

800+ people viewing

Last viewed: 1 hour ago

Response time: 53.28 hours

Vacuum Pumps

50 models listed

Screw type dry vacuum pump LS-ULVAC, Inc

Screw type dry vacuum pump LS

ULVAC, Inc

140+ people viewing

Last viewed: 16 hours ago

Response time: 73.88 hours

Vacuum Pumps

4 models listed

Vacuum pump technology has evolved towards new possibilities.Vertical dry vacuum pump TRV series for chemical processes-UNOZAWA-GUMI IRON WORKS,LTD.

Vacuum pump technology has evolved towards new possibilities.Vertical dry vacuum pump TRV series for chemical processes

UNOZAWA-GUMI IRON WORKS,LTD.

170+ people viewing

Last viewed: 2 hours ago

Vacuum Pumps

3 models listed

Diaphram type MF-10 vacuum pump-Mitsukai Seisakusho Co., Ltd.

Diaphram type MF-10 vacuum pump

Mitsukai Seisakusho Co., Ltd.

500+ people viewing

Last viewed: 6 hours ago

Response time: 44.94 hours

Vacuum Pumps

8 models listed

See More Vacuum Pumps Products

Other products of Fuji Inback Co., Ltd.

Reviews shown here are reviews of companies.

Turbo molecular pump (hybrid bearing) HiPace® series-Fuji Inback Co., Ltd.

Turbo molecular pump (hybrid bearing) HiPace® series

Fuji Inback Co., Ltd.

60+ people viewing

Vacuum Pumps

2 models listed

Dry pump (multi-stage roots type) Light Duty Applications Air-cooled ACP series-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Air-cooled ACP series

Fuji Inback Co., Ltd.

50+ people viewing

Vacuum Pumps

2 models listed

Vacuum Gauge Digiline Series Digital Piezo Gauge CPT200-Fuji Inback Co., Ltd.

Vacuum Gauge Digiline Series Digital Piezo Gauge CPT200

Fuji Inback Co., Ltd.

50+ people viewing

Vacuum Gauges
Turbomolecular pump (hybrid bearing) HiPace® Neo series (next generation type) HiPace® 80 Neo-Fuji Inback Co., Ltd.

Turbomolecular pump (hybrid bearing) HiPace® Neo series (next generation type) HiPace® 80 Neo

Fuji Inback Co., Ltd.

60+ people viewing

Vacuum Pumps

2 models listed

Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Compact A100L / A200L

Fuji Inback Co., Ltd.

50+ people viewing

Last viewed: 16 hours ago

Vacuum Pumps

2 models listed

Vacuum Gauge Digiline Series Digital Pirani Gauge PPT200-Fuji Inback Co., Ltd.

Vacuum Gauge Digiline Series Digital Pirani Gauge PPT200

Fuji Inback Co., Ltd.

50+ people viewing

Vacuum Gauges
Vacuum application equipment Vacuum deposition equipment-Fuji Inback Co., Ltd.

Vacuum application equipment Vacuum deposition equipment

Fuji Inback Co., Ltd.

50+ people viewing

Vacuum Vapor Deposition Devices

3 models listed

Turbomolecular pump (hybrid bearing) HiPace® H series (high compression ratio model)-Fuji Inback Co., Ltd.

Turbomolecular pump (hybrid bearing) HiPace® H series (high compression ratio model)

Fuji Inback Co., Ltd.

60+ people viewing

Last viewed: 14 hours ago

Vacuum Pumps

2 models listed

Dry pump (multi-stage roots type) Light Duty Applications Industrial use ACP120G / ACG600G-Fuji Inback Co., Ltd.

Dry pump (multi-stage roots type) Light Duty Applications Industrial use ACP120G / ACG600G

Fuji Inback Co., Ltd.

40+ people viewing

Vacuum Pumps

2 models listed

Vacuum Gauge Digiline Series Digital Piezo Pirani Gauge RPT200-Fuji Inback Co., Ltd.

Vacuum Gauge Digiline Series Digital Piezo Pirani Gauge RPT200

Fuji Inback Co., Ltd.

50+ people viewing

Last viewed: 4 hours ago

Vacuum Gauges
Vacuum application equipment Small vacuum evaporation equipment-Fuji Inback Co., Ltd.

Vacuum application equipment Small vacuum evaporation equipment

Fuji Inback Co., Ltd.

60+ people viewing

Vacuum Vapor Deposition Devices

3 models listed

Turbomolecular pump (hybrid bearing) HiPace® P series (model for process equipment)-Fuji Inback Co., Ltd.

Turbomolecular pump (hybrid bearing) HiPace® P series (model for process equipment)

Fuji Inback Co., Ltd.

60+ people viewing

Vacuum Pumps

2 models listed


View more products of Fuji Inback Co., Ltd.

About Company Handling This Product

Fuji Inback Co., Ltd.

Related search keywords

Vacuum Pumps
Vacuum Pumps　Fuji Inback Co., Ltd.
Fuji Inback Co., Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2025 Metoree