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  4. Turbomolecular pump (magnetic levitation) HiPace M series (Fuji Inback Co., Ltd.)
Turbomolecular pump (magnetic levitation) HiPace M series-HiPace® 300M
Turbomolecular pump (magnetic levitation) HiPace M series-Fuji Inback Co., Ltd.

Turbomolecular pump (magnetic levitation) HiPace M series
Fuji Inback Co., Ltd.

About This Product

■Application

・High-end electron microscope ・Residual gas analysis ・Optical coating ・Plasma research ・Biotechnology ・Medical technology ・Semiconductor application ・Thin film technology ・Hard disk manufacturing

■Features

HiPace M series turbo pumps are equipped with a 5-axis magnetic levitation suspension. Designed for high vacuum applications, it uses a composite rotor, and its oil-free magnetic levitation virtually eliminates the need for maintenance and the possibility of contamination. Even for vibration-sensitive applications, HiPace M has extremely low vibration and magnetic field leakage. In the event of a power outage, a controller attached to the turbo pump uses the pump motor as a generator to keep the rotor stable.

  • Product

    Turbomolecular pump (magnetic levitation) HiPace M series

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1 Models of Turbomolecular pump (magnetic levitation) HiPace M series

Image Part Number Price (excluding tax)
Turbomolecular pump (magnetic levitation) HiPace M series-Part Number-HiPace® 300M

HiPace® 300M

Available upon quote

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Fuji Inback Co., Ltd.

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