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  4. Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter) (Fuji Inback Co., Ltd.)
Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)-HiPace® 1200IT
Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)-Fuji Inback Co., Ltd.

Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)
Fuji Inback Co., Ltd.

About This Product

■Application

・Ion implantation

■Features

・Specialized for light gas exhaust ・High durability achieved by nickel coated rotor ・Temperature control system* reduces condensation and deposits (*models equipped with heater)

  • Product

    Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)

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1 Models of Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)

Image Part Number Price (excluding tax)
Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)-Part Number-HiPace® 1200IT

HiPace® 1200IT

Available upon quote

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Fuji Inback Co., Ltd.

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