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Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series-AP-80
Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series-Meiritsu Seiki Co., Ltd.

Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series
Meiritsu Seiki Co., Ltd.


About This Product

An optimal vibration isolation system tailored to the characteristics of precision equipment can be configured at low cost. It goes without saying that vibration isolators must have excellent performance, but also need to be more flexible. This is because the best vibration isolation systems tailored to the characteristics of precision equipment are increasingly being incorporated directly into the equipment. The AP series is a vibration isolation system that can immediately meet these needs. In addition to ample functionality, it is also highly expandable. This vibration isolation system creates a more ideal vibration environment.

■Application field

・Measurement/weighing equipment ・Semiconductor manufacturing/Precision processing Overview/Features

■Meiritsu's air spring vibration isolation system with outstanding technology and track record

We use an air spring system that has a proven track record in a wide range of fields, from microscopes and laser application technology to semiconductor manufacturing and inspection equipment. It guarantees excellent vibration isolation performance over a wide frequency band from several Hz to several hundred Hz. In addition, even when the air supply is cut off, the anti-vibration rubber at the bottom of the air spring protects the precision mechanisms of the installed equipment.

■Versatile unit type

When integrated into equipment, vibration isolation systems require a smaller installation space. The AP series is a compact unit type that includes an air spring and a highly sensitive level maintenance sensor that controls it. It can be installed without making any major changes to the specifications of the equipment, and provides high vibration isolation performance.

■Overall height is unified at 185mm (when floating)

All of these vibration isolation systems have a unified overall height of 185mm. In the unlikely event that the mass of the installed equipment increases or decreases due to design changes, this can be accommodated without changing the overall height of the device.

■Covering a wide range of mounting masses

The types and purposes of precision equipment that require vibration isolation are diversifying year by year. We have a lineup of 11 types from AP-80 to AP-380, depending on the mass of precision equipment, and can handle large precision equipment ranging from several hundred kilograms to over 10 tons.

■Can also be used in clean rooms

When used in a high-level clean room, it can be changed to a level maintenance sensor for clean rooms that can centrally exhaust air. (Please contact us separately as this is a special order. Also, changes cannot be made to the two-stage sensor.)

  • Product

    Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series

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1 Models of Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series

Image Part Number Price (excluding tax)
Seismic isolation device / Seismic isolation system Unit type Unit type air spring type vibration isolator AP series-Part Number-AP-80

AP-80

Available upon quote

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