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  3. Vibration Isolators
  4. Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series (Meiritsu Seiki Co., Ltd.)
Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series-MRZ-120
Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series-Meiritsu Seiki Co., Ltd.

Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series
Meiritsu Seiki Co., Ltd.

About This Product

We have achieved a low price active vibration isolator for large equipment such as FPD manufacturing equipment. The MAPS series has a long track record of delivery. Among them, we have developed and put into practical use the MRZ series, which has achieved improved cost performance by reviewing the design from the ground up, while maintaining the performance of MAPS-130 and 240, which were particularly requested.

■Application field

・Measurement/weighing equipment ・Semiconductor manufacturing/Precision processing Overview/Features

■Main uses

FPD/semiconductor manufacturing equipment, electron microscopes/vacuum related equipment, measuring equipment, ultra-precision processing machines, etc.

■6 degrees of freedom active control

・Unit type incorporating vertical and horizontal pneumatic actuators ・It also isolates vibrations in bands that are difficult to use with passive vibration isolation.

■Performs FB+FloorFF control in active state

・FB: Feedback control system ・FloorFF: Floor vibration feedforward control system ・StageFF: Stage feedforward control system (optional)

■"Lightweight and compact" "Low power consumption" "Low price"

We have achieved a lightweight and compact unit, reduced power consumption, and a low price.

■Patented

Patent No. 5457821

  • Product

    Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series

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1 Models of Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series

Image Part Number Price (excluding tax)
Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolator MRZ series-Part Number-MRZ-120

MRZ-120

Available upon quote

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