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  4. Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series (Meiritsu Seiki Co., Ltd.)
Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series-MAPS-008
Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series-Meiritsu Seiki Co., Ltd.

Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series
Meiritsu Seiki Co., Ltd.

About This Product

6-degree-of-freedom active control provides excellent vibration isolation, damping, and positioning performance against vibrations in all degrees of freedom. The MAPS series is an active vibration isolation unit that combines all the necessary functions into a small unit type that is easy to incorporate into your equipment.

■Application field

Semiconductor manufacturing/precision processing Overview/Features

■Supports vibration in all degrees of freedom despite its small size

Meiritsu Seiki's MAPS series active vibration isolation system is a unit type that incorporates vertical and horizontal pneumatic actuators in a compact form. By using 4 units, it provides excellent vibration isolation, damping, and positioning performance against vibrations in all degrees of freedom.

■Cuts vibrations in bands that are difficult to achieve with passive vibration isolation.

- Resonance due to natural vibration is often a problem with passive vibration isolation, but resonance due to natural vibration can be removed by activation. ・It is also possible to obtain excellent vibration isolation performance in this band. For example, low-frequency vibrations around 2 Hz, which passive vibration isolation is weak against, can be reduced to 1/30 to 1/100 of that of passive vibration isolation.

■Standard MAPS can isolate vibrations from equipment weighing more than 10 tons.

Recent precision instruments tend to become larger and larger as they become more functional. Equipment with a total weight of over 10 tons has already been developed. As equipment becomes larger, it becomes difficult to maintain a high natural frequency of the equipment itself, making it more susceptible to low-frequency vibrations that have rarely been a problem in the past. This is also one of the reasons why an active vibration isolation system with excellent vibration isolation performance for low frequency vibrations is required.

■Does not shake even when equipped with moving equipment such as a stage

・If a device that moves, such as an X-Y stage, is mounted on a passive vibration isolator that isolates vibrations by supporting it with a soft elastic body, the entire device will shake significantly, which may even increase the vibration. I'm sorry. ・Active vibration isolation uses feedback control to maintain a stationary state at all times, making it possible to reduce vibration. Furthermore, if the movement of the stage can be output as a signal in advance, feedforward control can be performed to minimize the generated vibrations, making it possible to provide an environment with almost no vibrations.

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    Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series

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1 Models of Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series

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Seismic isolation device/seismic isolation system Unit type Pneumatically controlled active vibration isolation system MAPS series-Part Number-MAPS-008

MAPS-008

Available upon quote

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