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  4. Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series (Meiritsu Seiki Co., Ltd.)
Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series-ME-0405
Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series-Meiritsu Seiki Co., Ltd.

Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series
Meiritsu Seiki Co., Ltd.

About This Product

This is a tabletop vibration isolation system with 6 degrees of freedom active control. Vibration is controlled by constantly monitoring the vibration of the mounting plate and applying opposite-phase force using the built-in actuator. Control in 3 dimensions (6 degrees of freedom).

■Application field

・Microscope system ・Measurement/weighing equipment ・Nano surface analysis Overview/Features

■6 degrees of freedom active control

- Vibration control by constantly monitoring the vibration of the mounting plate and applying opposite phase force using the built-in actuator. - Control in 3 dimensions (6 degrees of freedom).

■Automatic active adjustment & automatic leveling

Gain adjustment, which is essential for active control, is automatically optimized by Meiritsu Seiki's original control system.

■Vibration isolation performance unaffected by the load

By reviewing the structure of the device, it is now possible to use it with lightweight loads such as small SPMs without compromising vibration isolation performance. option

■Honeycomb optical surface plate can be installed (optional)

・The mounting plate can be changed to a high-rigidity steel honeycomb optical surface plate. ・The top surface tap M6-25mm matrix and the top plate made of magnetic stainless steel allow for flexible support for system construction using optical components, etc.

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    Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series

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1 Models of Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series

Image Part Number Price (excluding tax)
Vibration isolation device/vibration isolation system Tabletop type Tabletop active vibration isolation system ME series-Part Number-ME-0405

ME-0405

Available upon quote

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