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Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series-ME-0806D
Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series-Meiritsu Seiki Co., Ltd.

Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series
Meiritsu Seiki Co., Ltd.


About This Product

Desk-type active vibration isolation system The ME40 series, developed using vibration isolation technology cultivated over a long history and track record of delivery, has been renewed as the ME series. A 6-degree-of-freedom active vibration isolation mechanism is integrated into a compact body, providing a vibration environment that was not possible with conventional passive types. We are your best partner for maximizing the performance of high-precision, high-resolution precision equipment, which is required in the field of nanotechnology, which has seen remarkable progress in recent years. Overview/Features

■6 degrees of freedom active control

Vibration is controlled by constantly monitoring vibrations on the mounting board and installation surface, and applying forces in the opposite phase using the built-in actuator. Control in 3 dimensions (6 degrees of freedom).

■Automatic active adjustment & automatic leveling

Gain adjustment, which is essential for active control, is automatically optimized by Meiritsu Seiki's original control system.

■Can also handle lightweight loads

By reviewing the device structure, it can now be used with lightweight payloads such as small SPMs.

■ Operates only with power supply

The only utility required for use is a power supply. No air source such as a compressor is required. Can be installed in any location or environment.

■Application

Scanning probe microscope (SPM), confocal laser microscope, interferometer system, 3D shape measuring machine, laser displacement meter system, and other precision measurement and precision processing machines.

  • Product

    Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series

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1 Models of Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series

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Vibration isolation device/vibration isolation system Desk type Desk type active vibration isolation system ME-D series-Part Number-ME-0806D

ME-0806D

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