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  4. Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH (Air Water Mechatronics Co., Ltd.)
Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH-WGH
Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH-Air Water Mechatronics Co., Ltd.

Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH
Air Water Mechatronics Co., Ltd.

About This Product

■Features

・Decomposes NF3 to below allowable concentration (10 ppm) ・The gas at the exit of the abatement device does not contain CO2, NOx, or HF. ・Possible to eliminate harmful substances by operating at low temperatures starting from 270℃ ・Fluorine compounds after NF3 decomposition are fixed in the cartridge, so there is no need to install a secondary scrubber (no need for wastewater treatment equipment) ・Since it is a cartridge type, you can safely replace the abatement tube that has exhausted its capacity.

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    Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH

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1 Models of Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH

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Exhaust gas treatment equipment Exhaust gas treatment equipment for NF3 MODEL-WGH-Part Number-WGH

WGH

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