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  4. Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series (Air Water Mechatronics Co., Ltd.)
Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series-WGE-60
Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series-Air Water Mechatronics Co., Ltd.

Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series
Air Water Mechatronics Co., Ltd.

About This Product

This device is a wet type abatement device for etching processes. It is possible to remove target gases such as Cl2, HBr, BCl3, HCl, HF, SiF4, etc. to below the TLV value, which was not possible with conventional wet abatement.

■Features

・Since the adsorption tube is regenerated with water, the cartridge has a long lifespan. ・No alkali contamination as only water is used ・Low water consumption reduces running costs - Structure that reduces clogging at gas-liquid contact parts ・Continuous abatement is possible by automatic alternating operation of adsorption tubes.

  • Product

    Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series

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1 Models of Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series

Image Part Number Price (excluding tax)
Exhaust gas treatment equipment Adsorption regeneration type exhaust gas treatment equipment MODEL-WGE series-Part Number-WGE-60

WGE-60

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