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  2. Purification Equipment
  3. Exhaust Gas Treatment Devices
  4. Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT (Air Water Mechatronics Co., Ltd.)
Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT-W.G.T.
Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT-Air Water Mechatronics Co., Ltd.

Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT
Air Water Mechatronics Co., Ltd.

Air Water Mechatronics Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

2.1hours

Very Fast Response

About This Product

This equipment processes exhaust gases such as hydrogen compounds such as SiH4 and fluorine compounds such as C2F6 and SF6 emitted by semiconductor manufacturing equipment by thermally decomposing them using the hot exhaust gas of the combustion burner. In addition, products after thermal decomposition (SiO2 powder, acid gas, etc.) are post-processed using a wet scrubber in the same package.

■Features

・By separating the combustion nozzle and secondary combustion chamber, stable combustion is possible even when the flow rate fluctuates. ・Can handle exhaust gas with a maximum processing flow rate of 500ℓ/min (up to 4 ports available) ・Wall air prevents byproducts from adhering to the combustion chamber. ・Achieved space savings by adopting a direct cooling method using water spray immediately after the combustion tube ・Constant stirring of circulating water in the wet scrubber tank prevents circulation pump troubles caused by SiO2 powder slurry. - Equipped with various sensors to ensure complete safety measures ・Easy to operate and check operating status with touch panel

  • Product

    Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT

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1 Models of Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT

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Exhaust gas treatment equipment Combustion type exhaust gas treatment equipment MODEL-WGT-Part Number-W.G.T.

W.G.T.

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About Company Handling This Product

Air Water Mechatronics Co., Ltd.

Response Rate

100.0%

Response Time

2.1hrs

Related search keywords

Exhaust Gas Treatment Devices
Exhaust Gas Treatment Devices　Air Water Mechatronics Co., Ltd.
Air Water Mechatronics Co., Ltd.

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