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Precision products Special products Air slides Mirror finish stone products
Sekigahara Manufacturing Co., Ltd.


About This Product

■About this product

Grooves (minimum 0.2mm) and holes (minimum φ0.3) are made on a stone surface plate machined to a highly accurate plane, and wafers and glass are attracted and held using vacuum pressure. Surface roughness can be processed from Ra0.4 to Ra3.0. This contributes to the prevention of damage accidents caused by linking of workpieces. By performing sealing treatment and mirror finishing the surface roughness to Ra0.4, 1. Suppresses slight vibrations when driving 2. Improves straightness

■Three strengths

・Ultra high precision We have a dedicated factory for stone processing and assembly. Equipped with a constant temperature room (room temperature 23±1℃, humidity 50±10%), constant temperature booth (room temperature 23±0.1℃), and a wide range of measurement equipment, it is possible to create ultra-high precision on the submicron level. ・Suitable for large products and special processing We have a track record of processing a wide variety of stone materials, mainly surface plates and machine bases. We can also handle special machining, including hole machining (minimum φ0.8mm) and groove machining (minimum 0.2mm). ・From stone to ceramics From standard products to custom-made products, we utilize the grinding technology and know-how we have cultivated in all types of stone processing to handle high-precision processing of materials such as glass and ceramics, and composite materials.

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    Precision products Special products Air slides Mirror finish stone products

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1 Models of Precision products Special products Air slides Mirror finish stone products

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Air slide mirror finish stone products

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