Precision products Special products Vacuum suction table-Vacuum suction table

Precision products Special products Vacuum suction table
Sekigahara Manufacturing Co., Ltd.

About This Product

■About this productGrooves (minimum 0.2mm) and holes (minimum φ0.3) are made on a stone surface plate machined to a highly accurate plane, and wafers and glass are attracted and held using vacuum pressure.
Surface roughness can be processed from Ra0.4 to Ra3.0.
This contributes to the prevention of damage accidents caused by linking of workpieces.

■About surface roughness adjustment・We can handle a wide range of surfaces from mirror finish Ra0.4 to rough surface finish Ra3.0.
*Normal lap surface finish Ra0.8
・The surface is roughened to suppress electrical charge when peeling the glass substrate and prevent glass breakage.
・Surface roughening processing is possible while maintaining flatness accuracy.
・We also support on-site additional work.
*Please consult us regarding the flatness, shape, suction method, piping method, etc. of the suction table.
*There are two types of suction methods: groove method and hole method.

■Three strengths・Ultra high precision
We have a dedicated factory for stone processing and assembly. Equipped with a constant temperature room (room temperature 23±1℃, humidity 50±10%), constant temperature booth (room temperature 23±0.1℃), and a wide range of measurement equipment, it is possible to create ultra-high precision on the submicron level.

・Suitable for large products and special processing
We have a track record of processing a wide variety of stone materials, mainly surface plates and machine bases. We can also handle special machining, including hole machining (minimum φ0.8mm) and groove machining (minimum 0.2mm).

・From stone to ceramics
From standard products to custom-made products, we utilize the grinding technology and know-how we have cultivated in all types of stone processing to handle high-precision processing of materials such as glass and ceramics, and composite materials.

Model
There are 1 models for this product.

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Precision products Special products Vacuum suction table

Handling Company
Sekigahara Manufacturing Co., Ltd.

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1 Models of Precision products Special products Vacuum suction table

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	Vacuum suction table	Available upon quote

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Sekigahara Manufacturing Co., Ltd.

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Precision products Special products Vacuum suction table Sekigahara Manufacturing Co., Ltd.

About This Product

■About this product

■About surface roughness adjustment

■Three strengths

1 Models of Precision products Special products Vacuum suction table

Vacuum suction table

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Precision products Special products Vacuum suction table
Sekigahara Manufacturing Co., Ltd.