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  4. Mechanical booster pump PRC (ULVAC, Inc)
Mechanical booster pump PRC-PRC-003A
Mechanical booster pump PRC-ULVAC, Inc

Mechanical booster pump PRC
ULVAC, Inc

ULVAC, Inc's Response Status

Response Rate

100.0%

Response Time

73.9hours

About This Product

The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturing processes that require particularly cleanliness. By using a canned motor, there is no oil leakage from the shaft seal. Atmospheric pressure drive type is also available as an option. Features

■Oil free

Since there is no lubricating oil inside the casing chamber, stable performance is achieved even against steam such as water vapor and solvents.

■Canned motor adopted

By using a canned motor, we were able to eliminate the air/vacuum mechanical seal. It can be used in a clean environment without worrying about oil leaks.

■Surface treatment with excellent corrosion resistance

The main parts are anodized with high surface hardness and excellent corrosion resistance, which prevents scratches and corrosion inside the pump. An option without surface treatment is also available.

■Atmospheric pressure drive type effective for shortening exhaust time (optional: inverter)

Since it can be started simultaneously with the roughing pump, pumping time can be reduced compared to the standard type.

■Options available for special applications

In addition to standard models, we also have models for special applications.

■Applications

・Vapor deposition, sputtering, ion plating ・Vacuum drying, freeze drying, vacuum deaeration ・Analytical equipment, leak test equipment ・Gas replacement, filling, vacuum insulation ・Heat treatment furnace, melting furnace ・Other various vacuum equipment

  • Product

    Mechanical booster pump PRC

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1 Models of Mechanical booster pump PRC

Image Part Number Price (excluding tax)
Mechanical booster pump PRC-Part Number-PRC-003A

PRC-003A

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Response Rate

100.0%

Response Time

73.9hrs

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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Vacuum Pumps
Vacuum Pumps　ULVAC, Inc
ULVAC, Inc

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