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  4. Multistage roots type dry vacuum pump LR (ULVAC, Inc)
Multistage roots type dry vacuum pump LR-LR60
Multistage roots type dry vacuum pump LR-ULVAC, Inc

Multistage roots type dry vacuum pump LR
ULVAC, Inc

ULVAC, Inc's Response Status

Response Rate

100.0%

Response Time

73.9hours

About This Product

By uniformly heating the pump body in a low-temperature range, this pump is ideal for PVD processes as well as for exhausting loading and unloading chambers, where shortening exhaust time is particularly important in order to increase throughput. Features

■Heat uniformity in low temperature range (LR series)

In addition to PVD processes, it is especially suitable for exhausting loading and unloading chambers where shortening exhaust time is important to increase throughput.

■Helium tight

Equipped with a canned motor, it has a sealed structure and is extremely safe.

■Measures against instantaneous power outages

Measures are taken against momentary power outages within 1,000msec.

■Excellent corrosion resistance

Special surface treatment with high surface hardness and excellent corrosion resistance is adopted as standard for major parts. Reduces corrosion inside the pump when corrosive gas is exhausted.

■Communication function

Data related to pump operating status and warning/alarm history can be read. Centralized monitoring is possible by using dedicated software and communicating with a computer.

■Applications

・Film deposition equipment (sputtering equipment/evaporation equipment, etc.) ・Reduced exhaust time in the loading and unloading room ・As an auxiliary exhaust pump (auxiliary exhaust for turbo molecular pumps and mechanical booster pumps)

  • Product

    Multistage roots type dry vacuum pump LR

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1 Models of Multistage roots type dry vacuum pump LR

Image Part Number Price (excluding tax)
Multistage roots type dry vacuum pump LR-Part Number-LR60

LR60

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Response Rate

100.0%

Response Time

73.9hrs

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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ULVAC, Inc

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