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  4. Multistage roots type dry vacuum pump HR (ULVAC, Inc)
Multistage roots type dry vacuum pump HR-HR60
Multistage roots type dry vacuum pump HR-ULVAC, Inc

Multistage roots type dry vacuum pump HR
ULVAC, Inc

ULVAC, Inc's Response Status

Response Rate

100.0%

Response Time

73.9hours

About This Product

By uniformly heating the pump body in a high-temperature region, the pump is able to exhaust sublimable exhaust substances generated during CVD, etching, etc. in a gaseous state. Features

■ Uniform heating in high temperature area

It is possible to emit sublimated exhaust substances generated during CVD, etching, etc. in a gaseous state. The UR series can reach higher temperatures than the HR series.

■Helium tight

Equipped with a canned motor and has a sealed structure, making it extremely safe.

■Measures against instantaneous power outages

Measures are taken against momentary power outages within 1,000msec.

■Excellent corrosion resistance

Special surface treatment with high surface hardness and excellent corrosion resistance is adopted as standard for major parts. Reduces corrosion inside the pump when corrosive gas is exhausted.

■Communication function

Data related to pump operating status and warning/alarm history can be read. Centralized monitoring is possible by using dedicated software and communicating with a computer.

■Applications

・CVD equipment ・Etching equipment ・Ashing device ・ALD, ALH, etc.

  • Product

    Multistage roots type dry vacuum pump HR

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1 Models of Multistage roots type dry vacuum pump HR

Image Part Number Price (excluding tax)
Multistage roots type dry vacuum pump HR-Part Number-HR60

HR60

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Response Rate

100.0%

Response Time

73.9hrs

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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Vacuum Pumps
Vacuum Pumps　ULVAC, Inc
ULVAC, Inc

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