ULVAC, Inc's Response Status
This product is registered by ULVAC, Inc.
About This Product
The LS series is a vacuum pump classified as a screw type dry vacuum pump. Conventionally, increasing the pumping speed required a lot of power, but by combining a uniquely developed screw shape and power-saving technology, this dry vacuum pump achieves both high-speed pumping and low power consumption. With a lineup of 4 models, you can select the pump with the optimal exhaust capacity to match the size of the device, usage conditions, and application.
■Features
- Pumping speed near atmospheric pressure is up to 80m3/h, reducing pumping time by approximately 20% compared to conventional vacuum pumps.
・The standard equipped dedicated silencer eliminates the noise problem peculiar to dry vacuum pumps. The noise value at ultimate pressure is less than 61dB (A), a level that does not bother you during operation.
・ECO-SHOCK technology, which is standard on the C specification, is ULVAC's proprietary technology for power saving. Power consumption at ultimate pressure can be reduced to 0.6kW or less at ultimate pressure.
・The LS series does not require shaft seal gas. Running costs can be reduced in clean processes that mainly exhaust nitrogen and air.
・For those who wish to further increase the pumping speed, we recommend combining it with a mechanical booster pump. By combining them, it is possible to reach 120 to 1200m3/h.
Purpose
■C specification: Clean process
・Features: Low power consumption type with built-in ECO-SHOCK
・Applications: For clean exhaust such as air exhaust and N2 exhaust, sputtering/vapor deposition/bonding/load lock chamber/TMP assistance, etc.
■L specification: Light process
・Features: Light process type with surface treatment and purge functions
・Applications: For light processes such as water vapor and volatile chemical liquid exhaust, vacuum drying/freeze drying/ashing/general industrial use, etc.
■Standard accessories
Instruction manual (CD-R), power connector, waterproof cable clamp, signal connector, power connector guard
■Body options
Voltage specifications: 200V class or 400V class, seal material: perfluoroelastomer (L type only)
■External options
MBP intake port conversion flange, housing exhaust port, earthquake-resistant fixing bracket, LR compatible unit (intake port, signal), purge gas valve
-
-
Product
Screw type dry vacuum pump LS
Share this product
