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  4. Screw type dry vacuum pump MS (ULVAC, Inc)
Screw type dry vacuum pump MS-MS120A
Screw type dry vacuum pump MS-ULVAC, Inc

Screw type dry vacuum pump MS
ULVAC, Inc

ULVAC, Inc's Response Status

Response Rate

100.0%

Response Time

73.9hours

About This Product

The MS series is a vacuum pump classified as a screw type dry vacuum pump. This is a process-resistant dry vacuum pump based on the conventional LS series with improved corrosion resistance and powder discharge performance. Designed for use in vacuum processes involving corrosive gas or powder evacuation.

■Features

・High corrosion resistance is achieved by applying special surface treatment to main parts such as the rotor shaft and cylinder. - ULVAC's unique design of the screw-type rotor shaft achieves high powder evacuation performance. ・Continuous operation is possible in the entire pressure range from atmospheric pressure to ultimate pressure.

■Applications

・Vacuum exhaust system for electronic parts and semiconductor manufacturing equipment ・Etching equipment, ashing equipment, plasma cleaning equipment, etc. ・Vacuum exhaust system of vacuum heat treatment furnace, sintering furnace, carburizing furnace, etc. ・Lithium battery manufacturing equipment vacuum exhaust system, electrode drying equipment, defoaming equipment, liquid injection equipment, etc. ・Vacuum exhaust systems for medical and food-related equipment, freeze drying equipment, vacuum drying equipment, etc.

■Standard accessories

Quick manual, power connector, waterproof cable clamp, signal connector, power connector guard, 1 set of dedicated silencer

■Body options

・Power supply voltage: 200V class or 400V class ・Seal material: Fluororubber (FKM) or perfluoroelastomer (FFKM) ・External options: Chassis exhaust port, earthquake-proof fixture, LR compatible unit (intake port, signal), purge gas valve

  • Product

    Screw type dry vacuum pump MS

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1 Models of Screw type dry vacuum pump MS

Image Part Number Price (excluding tax)
Screw type dry vacuum pump MS-Part Number-MS120A

MS120A

Available upon quote

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About Company Handling This Product

ULVAC, Inc

Response Rate

100.0%

Response Time

73.9hrs

Company Overview

Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, c...

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  • Japan

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Vacuum Pumps　ULVAC, Inc
ULVAC, Inc

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