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  2. Robots
  3. Cleanroom Robots
  4. 3-axis cylindrical coordinate clean robot (PHT Co., Ltd.)
3-axis cylindrical coordinate clean robot-PHT2200
3-axis cylindrical coordinate clean robot-PHT Co., Ltd.

3-axis cylindrical coordinate clean robot
PHT Co., Ltd.

About This Product

■Product features

This product is a horizontal articulated glass substrate transfer robot for interposers used in clean rooms. It can move back and forth (X-axis), rotate (θ-axis), and up and down (Z-axis), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes.

  • Product

    3-axis cylindrical coordinate clean robot

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1 Models of 3-axis cylindrical coordinate clean robot

Image Part Number Price (excluding tax)
3-axis cylindrical coordinate clean robot-Part Number-PHT2200

PHT2200

Available upon quote

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About Company Handling This Product

PHT Co., Ltd.

  • Japan

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