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  4. 3-axis clean robot PHT-R-3 (PHT Co., Ltd.)
3-axis clean robot PHT-R-3-PHT-R-3
3-axis clean robot PHT-R-3-PHT Co., Ltd.

3-axis clean robot PHT-R-3
PHT Co., Ltd.

About This Product

■Product features

This product is a horizontal articulated robot used in clean rooms. It can move forward and backward (X-axis), rotate (θ-axis), up and down (Z-axis) + hand rotation (0 to 180°), and can handle wafer transport in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes.

  • Product

    3-axis clean robot PHT-R-3

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1 Models of 3-axis clean robot PHT-R-3

Image Part Number Price (excluding tax)
3-axis clean robot PHT-R-3-Part Number-PHT-R-3

PHT-R-3

Available upon quote

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About Company Handling This Product

PHT Co., Ltd.

  • Japan

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Cleanroom Robots
Cleanroom Robots　PHT Co., Ltd.
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