RF phase shifter
P.R.A. Co., Ltd.

About This Product

■Features・Supports multiple channels: 2~16CH
・Closed loop method cancels the phase shift inside the RF power supply
・Remote setting possible from outside
・Wide phase setting range, compatible with both delay and lead directions from the reference signal

■SummaryA phase shifter freely sets and controls the phase difference between the outputs of two or more RF power supplies. In semiconductor manufacturing processes such as etching, etching can be performed efficiently by setting and controlling the phase difference to an optimal value.

■RF phase shifterFreely set and control the phase difference between the outputs of two RF (high frequency) power supplies. This is a technology that obtains stable processing results by controlling the phase difference between the two RF power outputs when supplying multiple RF power outputs to one vacuum reaction chamber in the semiconductor manufacturing process.

This phase difference is particularly important in etching equipment. By setting and controlling this phase difference to an optimal value, etching can be performed efficiently and stably.

■Development of P.R.A phase shifterConventional phase shifters use an open-loop method using coils and capacitors, which causes the following problems.
・Phase delay occurs due to changes in the output of the RF power supply
・Manual settings are basically required; remote settings from outside are difficult.
・The phase setting range is narrow and only corresponds to the delay direction with respect to the reference signal.

By adopting a closed-loop method, we will solve the above problems and develop a phase shifter that can support multiple channels.

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There is 1 model available for this product.

Product
RF phase shifter

Handling Company
P.R.A. Co., Ltd.

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1 Models of RF phase shifter

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	RF phase shifter	Available upon quote

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Part Number

Price (excluding tax)

RF phase shifter

Available upon quote

About Company Handling This Product

RF phase shifter P.R.A. Co., Ltd.

About This Product

■Features

■Summary

■RF phase shifter

■Development of P.R.A phase shifter

1 Models of RF phase shifter

RF phase shifter

Other products of P.R.A. Co., Ltd.

About Company Handling This Product

RF phase shifter
P.R.A. Co., Ltd.