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  1. Metoree
  2. RF-matching network (P.R.A. Co., Ltd.)
RF-matching network-RF-matching network
RF-matching network-P.R.A. Co., Ltd.

RF-matching network
P.R.A. Co., Ltd.

💻 Electronics & Electrical Use

About This Product

■Features

・Less RF power loss ・Matching speed is fast ・Air cooling ・Compatible with full customization ・Monitor function for DC bias, RF peak voltage, etc.

■Summary

Matchers allow efficient delivery of RF power to semiconductor manufacturing equipment. Performs impedance matching between power supply and plasma load.

■Matcher

A matcher is a matching device that efficiently sends RF signals to semiconductor manufacturing equipment. In order to generate plasma efficiently, impedance matching between the RF power supply and semiconductor manufacturing equipment is required. As a current product, matching boxes manufactured by Company T are used by many semiconductor manufacturers. Problems that arise when using conventional matching boxes include ``deterioration occurs due to insufficient ratings of components within the device,'' and ``parts deteriorate or break down periodically, resulting in a short lifespan.'' You can

■Development of P.R.A. matcher compatible machine

We have developed a matcher that can be replaced with the conventional product without any problems by improving the problems of the conventional product, significantly improving the mean time between failures (MTBF), and implementing process compatibility measures. We will develop.

  • Product

    RF-matching network

  • Usage Scenarios

    Electronics & Electrical Use

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1 Models of RF-matching network

Image Part Number Price (excluding tax)
RF-matching network-Part Number-RF-matching network

RF-matching network

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About Company Handling This Product

P.R.A. Co., Ltd.

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