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  4. High voltage power supply for electrostatic chuck (ESC) (P.R.A. Co., Ltd.)
High voltage power supply for electrostatic chuck (ESC)-High voltage power supply for electrostatic chuck (ESC)
High voltage power supply for electrostatic chuck (ESC)-P.R.A. Co., Ltd.

High voltage power supply for electrostatic chuck (ESC)
P.R.A. Co., Ltd.

P.R.A. Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

21.0hours

Relatively Fast Response

About This Product

■Features

・Compatible design (interface/installation) with existing power supplies is also possible. - Improves wafer dechucking performance by incorporating current limiting, polarity reversal, and discharge functions. - Compatible with both Coulomb type and J-R type.

■Summary

By addressing technical application issues specific to high-voltage power supplies used in semiconductor manufacturing equipment from the design and circuit board design stage according to each customer's individual specifications, we can improve the issues and even lower the cost. We realize low cost, short delivery times, and high reliability.

■High voltage power supply for electrostatic chuck (ESC)

Bipolar ESC power supplies are the mainstream method for electrostatic chucking of wafers, and the technical solutions are as follows. ・The voltage applied to the positive and negative electrodes and the DC bias generated on the wafer when plasma is generated create an imbalance in the suction force of the electrostatic chuck. ・In order to cancel this, a bias voltage is applied to the center tap of the ESC power supply to cancel the bias, thereby achieving even absorption.

■What is ESC?

When handling silicon wafers for making semiconductor devices, glass substrates for liquid crystal panels, etc., it is necessary to suction and fix them in the vacuum chamber of the equipment. At that time, the traditional method of fixing with claws tends to cause scratches, and strong force is applied to certain parts, which can cause chips. Charges of opposite polarity appear near the electrodes, and charges of opposite polarity appear on the surface of the plate. When the plate is brought close to the silicon wafer in this state, charges are induced within the wafer, and the charges attract each other and become attracted to each other. At that time, the adsorption force is determined by the amount of charge on the plate surface. A high voltage power supply (ESCElectricStaticChuck power supply) is required to generate this charge.

■Development of P.R.A. ESC power supply

Most of the high-voltage power supplies for ESCs used in semiconductor manufacturing equipment are made overseas, and when repairing them, they must be sent to overseas manufacturers for repair, which means the repair costs including transportation costs are high, and the repair delivery time is high. is also longer.

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    High voltage power supply for electrostatic chuck (ESC)

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1 Models of High voltage power supply for electrostatic chuck (ESC)

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High voltage power supply for electrostatic chuck (ESC)-Part Number-High voltage power supply for electrostatic chuck (ESC)

High voltage power supply for electrostatic chuck (ESC)

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About Company Handling This Product

P.R.A. Co., Ltd.

Response Rate

100.0%

Response Time

21.0hrs

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High Voltage Power Supply Units　P.R.A. Co., Ltd.
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