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Wafer loader NWL200 for LSI inspection microscope-NWL200
Wafer loader NWL200 for LSI inspection microscope-Ryokosha Co., Ltd.

Wafer loader NWL200 for LSI inspection microscope
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

27.5hours

Relatively Fast Response


About This Product

■Summary

A highly reliable, high-performance loader that can transport a variety of wafers.A wafer loader that allows for micro-inspection and visual macro-inspection in combination with an optical microscope. Compatible with 200mm and 150mm wafer sizes. By combining options, it is possible to transport wafers with a maximum thickness of 100μm. Features

■High reliability

Even in the event of a sudden power outage, the macro inspection mechanism's vacuum suction is designed to remain ON, allowing wafers on the device to be stored without tweezers.

■Macro inspection mechanism

Macro inspection around the front/back side/center of the back side is possible. The rotation speed and tilt angle can be set using the volume knob or manually using the joystick.

■Achieves high throughput

The speedy vertical movement of the elevator, quick and accurate alignment through non-contact centering, and efficient wafer loading/unloading operations enable streamlined wafer transfer and exchange operations.

■Ergonomic design

The control panel is centrally located on the front of the main unit, closer to the operator, and each device is positioned to minimize the movement of the operator's hands and eyes. The front panel features a new wafer slot button that allows you to select any wafer stored in the slot with a single button. Furthermore, by placing the carrier at a 35° angle to the front left, we have ensured a work system for mounting the carrier and also made it possible to visually inspect the wafer inside the carrier. function

■Contamination measures

Adopts non-contact centering to prevent contamination due to friction or impact with the wafer. A clean air flow path compatible with downflow is also provided. The cover is made of stainless steel, which does not accumulate static electricity and does not attract dust easily.

■Efficient user interface

Employs a wafer slot button that allows you to select any wafer with a single button. The LCD panel allows you to check the condition settings such as sampling/inspection patterns, operating status, and error details at a glance. It also has extensive file management functions for carriers, samples, etc.

■Improvement of wafer sensing function

By optimizing the placement of the wafer sensor beam, we can accurately detect the height of even thin wafers with large distortions within the carrier, enabling safe transportation.

  • Product

    Wafer loader NWL200 for LSI inspection microscope

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1 Models of Wafer loader NWL200 for LSI inspection microscope

Image Part Number Price (excluding tax)
Wafer loader NWL200 for LSI inspection microscope-Part Number-NWL200

NWL200

Available upon quote

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About Company Handling This Product

Response Rate

100.0%


Response Time

27.5hrs

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