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Transfer machine/robot wafer loader AL120-AL120
Transfer machine/robot wafer loader AL120-Ryokosha Co., Ltd.

Transfer machine/robot wafer loader AL120
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

39.9hours


About This Product

■Summary

The AL120 wafer loader is a device that transports silicon and compound wafers from cassettes to the microscope stage, and supports wafer sizes from small diameter to 200mm. It can handle ultra-thin wafers and contributes to improving yield and productivity in semiconductor back-end processes by safely and efficiently transporting wafers. Features

■Wide adaptability and high reliability: You can select the most suitable machine depending on the wafer size and inspection content.

Three types are available: a 200mm wafer-specific type, a 200mm/150mm dual-use type, and a 150mm type (compatible with wafers smaller than 150mm). Furthermore, depending on the inspection content, you can choose between the "L type", a model exclusively for micro inspections, and the "LMB type", a model for both micro and macro inspections.

■Thin wafer inspection

In response to the growing needs for thin wafer processing, the AL120-LMB-90 is equipped with a new arm that can transport 25 cassettes of wafers up to 90um thin.

■You can create your own application software for wafer transport and various inspection operations.

By using the optional "AL120 RS232C communication unit", external control of the AL120 is possible. Additionally, you can easily create application software by using the included DLL.

■Evolved precision inspection function Advanced macro inspection

Backside macro inspection supports tilt angles of up to 360°, making it easy to find scratches and dirt. By using the 360° rotation function, visual inspection is possible all around the edges of the wafer. In addition, for surface macro inspection, you can freely tilt the surface up to 30 degrees using the joystick at hand.

■Easy operability

AL120 can register up to 10 inspection programs and can handle a variety of inspection methods. This feature can be used to accommodate specific cassettes and wafers, allowing operators to switch inspection programs with the touch of a button.

■High reliability Designed with safety in mind

The cassette is installed from the front of the device to ensure safe wafer loading. It has SEMI S2/S8 ratings for safety and ergonomics, and is also environmentally friendly, including RoHS compliance.

  • Product

    Transfer machine/robot wafer loader AL120

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1 Models of Transfer machine/robot wafer loader AL120

Image Part Number Price (excluding tax)
Transfer machine/robot wafer loader AL120-Part Number-AL120

AL120

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About Company Handling This Product

Response Rate

100.0%


Response Time

39.9hrs

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