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  4. Film thickness meter PCA ellipsometer SE-102 (Ryokosha Co., Ltd.)
Film thickness meter PCA ellipsometer SE-102-SE-102
Film thickness meter PCA ellipsometer SE-102-Ryokosha Co., Ltd.

Film thickness meter PCA ellipsometer SE-102
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

31.3hours

Relatively Fast Response

About This Product

■Summary

An ellipsometer is a measuring device that can simultaneously measure the thickness and refractive index of optical thin films. Its principle uses the phenomenon that the polarization state of light reflected from a sample changes depending on the film thickness and refractive index. Therefore, the basic configuration of an ellipsometer consists of a light source, a light receiving element, and a mechanism for measuring the state of polarization. This method makes it possible to measure extremely thin films that cannot be measured using step meters, so its importance and fields of use have been expanding in recent years. One of the issues with conventional ellipsometers was the size of the device. This is because the mechanism for measuring the state of polarization requires a drive mechanism that rotates optical elements such as polarizers and wave plates, as shown in the figure on the right. This problem was common to multiple ellipsometer methods. The PCA ellipsometer has broken the preconceived notion that a rolling drive mechanism is essential. By combining a photonic crystal array and a CCD, we succeeded in completely eliminating the drive mechanism from the ellipsometer. It is small, lightweight, and highly accurate, and the environments in which it can be used have expanded dramatically. The PCA Ellipsometer changes the concept of an ellipsometer.

■Features

・Point measurement: Real-time measurement at a maximum interval of about 1/10 seconds is possible. It is also effective for time-varying analysis of film thickness. ・Line measurement: Measures data at 100 points at 0.2 mm intervals in about 5 seconds. You can easily measure "film thickness changes" that cannot be obtained with a step meter. ・Surface measurement Scan measurement of an area approximately 2 mm wide up to a maximum of 20 mm. It scans 50,000 points of high-resolution surface data in about 30 seconds and outputs the measurement results in about 1 minute, boasting overwhelming high speed.

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    Film thickness meter PCA ellipsometer SE-102

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1 Models of Film thickness meter PCA ellipsometer SE-102

Image Part Number Price (excluding tax)
Film thickness meter PCA ellipsometer SE-102-Part Number-SE-102

SE-102

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About Company Handling This Product

Ryokosha Co., Ltd.

Response Rate

100.0%

Response Time

31.3hrs

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