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  4. Film thickness meter PCA-Ellipsometer SE-101 (Ryokosha Co., Ltd.)
Film thickness meter PCA-Ellipsometer SE-101-SE-101
Film thickness meter PCA-Ellipsometer SE-101-Ryokosha Co., Ltd.

Film thickness meter PCA-Ellipsometer SE-101
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

31.3hours

Relatively Fast Response

About This Product

■Summary

This is a high-speed, compact ellipsometer that uses a photonic crystal polarization sensor to eliminate the need for a rotating drive unit. An ellipsometer is a measuring device that can simultaneously measure the thickness and refractive index of optical thin films. Its principle uses the phenomenon that the polarization state of light reflected from a sample changes depending on the film thickness and refractive index. Therefore, the basic configuration of an ellipsometer consists of a light source, a light receiving element, and a mechanism for measuring the state of polarization. This method makes it possible to measure extremely thin films that cannot be measured using step meters, so its importance and fields of use have been expanding in recent years. One of the issues with conventional ellipsometers was the size of the device. This is because the mechanism for measuring the state of polarization requires a drive mechanism that rotates optical elements such as polarizers and wave plates, as shown in the figure on the right. This problem was common to multiple ellipsometer methods. The PCA ellipsometer has broken the preconceived notion that a rolling drive mechanism is essential. By combining a photonic crystal array and a CCD, we succeeded in completely eliminating the drive mechanism from the ellipsometer. It is small, lightweight, and highly accurate, and the environments in which it can be used have expanded dramatically. The PCA Ellipsometer changes the concept of an ellipsometer.

■Features

-Small and portable (approx. 4kg). ・Single wavelength ellipsometer suitable for daily film thickness/refractive index management. -Easy to adjust and can be easily operated by anyone. ・High-speed measurement (less than 0.1 seconds). - All necessary functions such as collimator unit, PC, and software are included as standard. ・The entire optical system including the laser unit, polarization sensor, and collimator is integrated and removable.

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    Film thickness meter PCA-Ellipsometer SE-101

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1 Models of Film thickness meter PCA-Ellipsometer SE-101

Image Part Number Price (excluding tax)
Film thickness meter PCA-Ellipsometer SE-101-Part Number-SE-101

SE-101

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About Company Handling This Product

Ryokosha Co., Ltd.

Response Rate

100.0%

Response Time

31.3hrs

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