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3D measurement laser microscope LEXT OLS5100-OLS5100
3D measurement laser microscope LEXT OLS5100-Ryokosha Co., Ltd.

3D measurement laser microscope LEXT OLS5100
Ryokosha Co., Ltd.

Ryokosha Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

31.3hours

Relatively Fast Response


About This Product

■Summary

Equipped with a 405nm laser, this model is capable of high-resolution 3D shape observation, measurement, and roughness measurement in minute areas. Main features

■Violet vision

This is an observation method that uniformly illuminates a sample with light and captures the light that is transmitted or reflected by the sample. This is the most common observation method that allows you to obtain contrast in the observed image by varying the transmittance or reflectance of the sample.

■Differential interference

This is an observation method that uses the polarization and coherence properties of light to see minute differences on the surface of a sample that are normally invisible. A prism is used to separate the illumination light into two laterally shifted beams to illuminate the sample. By taking the difference between the two light beams directly reflected from the sample, a contrast between light and dark is generated, making it possible to observe minute differences in three dimensions.

■300mm wafer compatible

This microscope is equipped with a stage with a large stroke that enables full-surface observation of 300mm wafers. By combining transmitted illumination, it can also be used for 17-inch FPD inspection.

■Short wavelength laser

By observing using a violet laser, which has a shorter wavelength than visible light, it is possible to obtain higher resolution than an optical microscope.

■Roughness measurement

It is possible to perform "line roughness measurement" to measure a single line on the sample surface, and "surface roughness measurement" to measure the entire surface. Equipped with the same calibration, surface roughness parameters, and filters as contact-type surface roughness measuring machines, data compatible with conventional contact-type surface roughness measuring machines can be obtained. Furthermore, by taking advantage of the non-contact method, it is possible to measure the roughness of soft or sticky samples, which is difficult to do with contact methods.

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    3D measurement laser microscope LEXT OLS5100

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1 Models of 3D measurement laser microscope LEXT OLS5100

Image Part Number Price (excluding tax)
3D measurement laser microscope LEXT OLS5100-Part Number-OLS5100

OLS5100

Available upon quote

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About Company Handling This Product

Response Rate

100.0%


Response Time

31.3hrs

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