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  4. Temperature-programmed desorption analyzer TDS1200Ⅱ (Electronic Science Co., Ltd.)
Temperature-programmed desorption analyzer TDS1200Ⅱ-TDS1200Ⅱ
Temperature-programmed desorption analyzer TDS1200Ⅱ-Electronic Science Co., Ltd.

Temperature-programmed desorption analyzer TDS1200Ⅱ
Electronic Science Co., Ltd.

About This Product

■Characteristics of temperature programmed desorption analyzer TDS1200Ⅱ

The temperature-programmed desorption analyzer TDS1200II is an analyzer that uses a quadrupole mass spectrometer (QMS) to observe molecules desorbed in real time when a sample is heated programmatically using infrared rays in an ultra-high vacuum environment (10-7 Pa or less). is. Compared to thermal analyzers that heat samples in an atmospheric pressure environment (105Pa), observations can be made in a lower background environment. Even atmospheric components (water, hydrogen, oxygen, nitrogen, carbon dioxide, etc.) that are difficult to reduce background in an atmospheric pressure environment can be observed with high sensitivity. In addition, the structure is such that only the sample is heated, so the background does not increase even in high temperature ranges, making it possible to observe desorbed molecules with high sensitivity. Chemical species can be identified and quantified for molecules desorbed from samples. It is also possible to obtain information such as the adsorption/bonding state and diffusion process of desorbed molecules. Ideal for measuring thin film samples and thin plate samples. The new TDS1200Ⅱ has renewed the previous TDS1200's system and adopted a touch panel for the interface. Meets CE mark usage standards.

■Equipped with load lock chamber

A load-lock chamber is essential for high measurement efficiency (high throughput) and high sensitivity. Our load lock chamber and sample transport mechanism allow only the sample to be quickly introduced into the ultra-high vacuum analysis chamber. Without a load-lock chamber, the analysis chamber must be vented to the atmosphere every time a sample is replaced. Once the analysis chamber is opened to the atmosphere, a large amount of atmospheric components (particularly moisture) will be adsorbed inside the analysis chamber, and it will take a long time to fully evacuate the chamber.

■Infrared heating method

In temperature-programmed desorption analysis, it is important that the analysis chamber and its components are not heated when the sample is heated. In TDS, where the chamber is heated, it is difficult to distinguish between gas desorbed from the sample and gas desorbed from the chamber. The TDS1200II directly heats the sample with infrared rays introduced through the quartz rod, which minimizes the increase in background levels even in high-temperature regions and enables highly sensitive measurements.

■Quadrupole mass spectrometer (QMS) arrangement

A QMS ionization chamber is placed directly above the sample to detect the desorbed gas with high sensitivity.

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    Temperature-programmed desorption analyzer TDS1200Ⅱ

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1 Models of Temperature-programmed desorption analyzer TDS1200Ⅱ

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Temperature-programmed desorption analyzer TDS1200Ⅱ-Part Number-TDS1200Ⅱ

TDS1200Ⅱ

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Electronic Science Co., Ltd.

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