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  4. Precision air conditioning chamber (Hitachi Plant Service Co., Ltd.)
Precision air conditioning chamber-Precision air conditioning chamber
Precision air conditioning chamber-Hitachi Plant Service Co., Ltd.

Precision air conditioning chamber
Hitachi Plant Service Co., Ltd.

About This Product

We provide ultra-precise temperature environments in manufacturing processes in the electronics and precision fields, supporting yield improvements.

■Summary

At sites where precise measurements and micro-processing are performed, such as in the semiconductor and FPD fields, fluctuations in environmental factors such as air temperature, humidity, and pressure cause measurement and processing errors, and advanced environmental control is required. . In order to provide the high-quality work environment required for ultra-precision measurement and processing, we have developed a "precision air conditioning chamber" that can control air temperature within ±5/10,000 degrees Celsius.

■Features

・Control the installation environment (target space) of equipment for precision measurement and microprocessing to ±5/10,000℃ - Cheaper than conventional vacuum chamber methods. System overview

■Whole air conditioning

Controls the temperature of the entire precision air conditioning chamber. Maintains a uniform installation environment for the equipment and protects the target space. Temperature fluctuation within ±1/100℃ Temperature distribution within ±5/100℃

■Cold water control

Controls chilled water with high precision of ±1/100℃ and maintains constant circulating air.

■Air conditioning for target space

It supplies airflow controlled down to the ±1/1,000℃ level to target spaces that require high precision.

■Target space

This is a space where precise measurements and fine processing are performed.

■Application

・Inspection process for semiconductor and liquid crystal device parts (preventing expansion and contraction of circuit boards and machinery) ・Precision processing equipment ・Precision measuring equipment, etc.

  • Product

    Precision air conditioning chamber

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1 Models of Precision air conditioning chamber

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Precision air conditioning chamber-Part Number-Precision air conditioning chamber

Precision air conditioning chamber

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About Company Handling This Product

Hitachi Plant Service Co., Ltd.

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Precision Air Conditioning
Precision Air Conditioning　Hitachi Plant Service Co., Ltd.
Hitachi Plant Service Co., Ltd.

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