Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz
Piezo Parts Co., Ltd.
About This Product
The vacuum deposition film thickness sensor (hereinafter referred to as "film thickness monitor crystal") is a sensor used during vacuum film formation to detect the physical film thickness. Our film thickness monitor crystals are designed and manufactured using advanced technology. We offer sensors with even lower oscillation variations. In our business of recycling crystals entrusted to us by our customers, we provide feedback on the results.
■What is the vacuum deposition film thickness sensor?
The heated evaporation material adheres to the film thickness monitor crystal as well as the substrate. When the deposition material adheres to the film thickness monitor crystal, the frequency of the film thickness monitor crystal changes according to the change in the mass of the deposited material. The amount of change in this frequency is used to measure the film thickness and film formation rate, and in film formation equipment such as vacuum evaporation equipment, feedback is sent to the heating control device of the evaporation source to control the evaporation rate to the substrate at a constant level. It can be done.
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Product
Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz
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Handling Company
Piezo Parts Co., Ltd.
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Categories
1 Models of Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz
| Product Image | Part Number | Price (excluding tax) | Center frequency | Electrode material | External dimensions | Frequency temperature characteristics | Frequency tolerance range | Operating temperature range | Series resistance |
|---|---|---|---|---|---|---|---|---|---|
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6A100W |
Available upon quote | 5,985kHz | Au | Φ14 | ±50ppm | ±5.0kHz | 25~120℃ | 15Ωmax |
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About Company Handling This Product
- Japan