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  4. Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz (Piezo Parts Co., Ltd.)
Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz-6A100W
Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz-Piezo Parts Co., Ltd.

Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz
Piezo Parts Co., Ltd.

Piezo Parts Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

4.1hours

Very Fast Response

About This Product

The vacuum deposition film thickness sensor (hereinafter referred to as "film thickness monitor crystal") is a sensor used during vacuum film formation to detect the physical film thickness. Our film thickness monitor crystals are designed and manufactured using advanced technology. We offer sensors with even lower oscillation variations. In our business of recycling crystals entrusted to us by our customers, we provide feedback on the results.

■What is the vacuum deposition film thickness sensor?

The heated evaporation material adheres to the film thickness monitor crystal as well as the substrate. When the deposition material adheres to the film thickness monitor crystal, the frequency of the film thickness monitor crystal changes according to the change in the mass of the deposited material. The amount of change in this frequency is used to measure the film thickness and film formation rate, and in film formation equipment such as vacuum evaporation equipment, feedback is sent to the heating control device of the evaporation source to control the evaporation rate to the substrate at a constant level. It can be done.

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    Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz

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1 Models of Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz

Image Part Number Price (excluding tax) Electrode material Series resistance External dimensions Frequency tolerance range Frequency temperature characteristics Operating temperature range Center frequency
Film thickness sensor for vacuum deposition Film thickness monitor for vacuum deposition 6MHz-Part Number-6A100W

6A100W

Available upon quote

Au

15Ωmax

Φ14

±5.0kHz

±50ppm

25~120℃

5,985kHz

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About Company Handling This Product

Piezo Parts Co., Ltd.

Response Rate

100.0%

Response Time

4.1hrs

  • Japan

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