3D measuring device for glass substrates NSAT Series SR&ABF Thickness Module
Nidek Advanced Technology Co., Ltd.
About This Product
High-speed, high-precision 3D measurement device compatible with next-generation substrates
■Features
・Depth 5μm, compatible with LineSpace2/2
・Thickness measurement of SR/ABF using transmission measurement method
・Technical strength and reliability that can handle glass cores
■Measurement function
・Trace
・Pad
・Via
・Anchor
・Overlay
・Film
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Product
3D measuring device for glass substrates NSAT Series SR&ABF Thickness Module
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Handling Company
Nidek Advanced Technology Co., Ltd.
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Categories
1 Models of 3D measuring device for glass substrates NSAT Series SR&ABF Thickness Module
| Product Image | Part Number | Price (excluding tax) | Lens NIRLens | Lens TubeLens | Repeatability | Resolution | Scan range | Scan speed |
|---|---|---|---|---|---|---|---|---|
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SR&ABF Thickness Module |
Available upon quote | ×20 | ×2.0 | <1um3σ,Measuring Samples (SRandABF) | WSI<0.5nm | ≤270um | 48.9um/s |
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