3D measuring device for glass substrate NSAT Series 3D Head
Nidek Advanced Technology Co., Ltd.
About This Product
High-speed, high-precision 3D measurement device compatible with next-generation substrates
■Features
・Depth 5μm, compatible with LineSpace2/2
・Thickness measurement of SR/ABF using transmission measurement method
・Technical strength and reliability that can handle glass cores
■Measurement function
・Trace
・Pad
・Via
・Anchor
・Overlay
・Film
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Product
3D measuring device for glass substrate NSAT Series 3D Head
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Handling Company
Nidek Advanced Technology Co., Ltd.
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Categories
1 Models of 3D measuring device for glass substrate NSAT Series 3D Head
| Product Image | Part Number | Price (excluding tax) | F.O.V.Turret | Illumination | Panel size | Repeatability | Resolution | Scan range | Scan speed |
|---|---|---|---|---|---|---|---|---|---|
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3D Head |
Available upon quote | ×0.55,×0.75,×1.0,×1.5,×2.0 (4FOVLensAvailable) | White LED Illumination | Max.510mm×610mm | ≤0.1%@1σ (VLSI7.969um±0.065,Repeat16times) | WSI<0.5nm,PSI<0.1nm,FastCSI<1.5nm | ≤270um | Max.65um/s |
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