Product
PLD20 type excimer laserHandling Company
Profitet Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | Average power | Beam size (V×H) | Cooling | Dimensions (L×W×H) | Divergence angle (V×H) | Gas type | Maximum pulse energy | Maximum repetition frequency | Power supply | Pulse width (FWHM) | Stability (σ) | Wavelength | Weight |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
PLD20 type excimer laser ArF |
Available upon quote | 6W | 22×6mm | Water cooling | 1,000×450×660mm | 3×1mrad | ArF | 400mJ | 20Hz | 220V/50Hz/14A/single layer | Approximately 25ns | 3% | 193nm | 230kg |