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  4. Automated Stage ALIO Industries Hexapod Stage (Autex Co., Ltd.)
Automated Stage ALIO Industries Hexapod Stage-Hexapod stage
Automated Stage ALIO Industries Hexapod Stage-Autex Co., Ltd.

Automated Stage ALIO Industries Hexapod Stage
Autex Co., Ltd.

About This Product

■ALIO has released a hybrid hexapod that can tilt ±30°. 360° rotation is also possible. Patented High Rigidity Long Stroke Hexapod Stage

Patent technology from ALIO Industries. "Hybrid Hexapod" is a new type of hexapod that combines the freedom of parallel kinematics with the precision and rigidity of serial kinematics. Its major feature is that even though it is a long-stroke hexapod, it achieves a repeatability of ±80nm even as a standard. It has major advantages over conventional systems in terms of compactness, high rigidity, long stroke, and high precision, making it possible to create completely new system designs for applications such as precision machining and precision alignment. Features

■Long stroke parallel kinematics

Technically, meter stroke XY is possible (standard is 400mm). True nano stage boasts a stroke of Z: <205mm, Θx, θy: <40°, θz: 360°. The lineup ranges from small to large types in combination.

■User-friendly controller method

Since kinematic calculations are embedded in the controller, users can control it using coordinate control. The rotation axis (TCP) can be set to any coordinates from the software during startup, allowing a high degree of freedom of movement without stopping the operation.

■High-performance motor/optical encoder adopted

By using products from leading European and American manufacturers, we have achieved not only accuracy but also high reliability. MTBF>100,000h.

■Standard upgrade with Ultra/Nano option

Many upgrade options available. Accuracy has been improved through laser mapping and improved accuracy of structural components.

■Direct assembly possible with various stages.

It can be directly attached to over 400 stages provided by ALIO Industries without using an adapter plate. The result is a 6D Point Precision compliant multi-axis stage system.

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    Automated Stage ALIO Industries Hexapod Stage

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1 Models of Automated Stage ALIO Industries Hexapod Stage

Image Part Number Price (excluding tax) Repeatability Rotation (ZΘ) Tilt Z stroke XY stroke
Automated Stage ALIO Industries Hexapod Stage-Part Number-Hexapod stage

Hexapod stage

Available upon quote

±80nm

360°

<±30°

≧6mm

≧60mm

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