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  4. Automatic stage ALIO Industries XY stage (Autex Co., Ltd.)
Automatic stage ALIO Industries XY stage-XY stage
Automatic stage ALIO Industries XY stage-Autex Co., Ltd.

Automatic stage ALIO Industries XY stage
Autex Co., Ltd.

Autex Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

116.3hours

About This Product

■True nano Tech thin high rigidity stage

Made by ALIO Industries, which has made an impact on high-end stage manufacturers around the world. XY stage system. ALIO Industries' signature stage has succeeded in achieving high precision and high rigidity at the same time by integrating the XY axes instead of the conventional method of combining single axes. Features

■Thin, high-rigidity design with 3 plates

By placing high-precision cross rollers perpendicular to both sides of the middle plate, a thin design achieves high precision and high rigidity. Regardless of the stroke, repeatability of ±30nm is achieved using next-generation standard 6D Point Precision.

■High-performance motor/optical encoder adopted

By using products from leading European and American manufacturers, we have achieved not only accuracy but also high reliability. MTBF>100,000h.

■Standard upgrade with Ultra/Nano option

Many upgrade options available. Accuracy has been improved through laser mapping and improved accuracy of structural components.

■Direct assembly possible with various stages.

It can be directly attached to over 400 stages provided by ALIO Industries without using an adapter plate. The result is a 6D Point Precision compliant multi-axis stage system.

  • Product

    Automatic stage ALIO Industries XY stage

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1 Models of Automatic stage ALIO Industries XY stage

Image Part Number Price (excluding tax) Repeatability Maximum speed Resolution Stroke
Automatic stage ALIO Industries XY stage-Part Number-XY stage

XY stage

Available upon quote

±30nm

0.5-1.0m/sec

<5nm

30-450mm

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About Company Handling This Product

Autex Co., Ltd.

Response Rate

100.0%

Response Time

116.3hrs

  • Japan

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