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XY stage VB series-VB70
XY stage VB series-Vacuum Products Co., Ltd.

About This Product

■Summary

Move in XY based on the base flange. Since it uses a high-precision linear guide, positioning in vacuum with good reproducibility can be easily performed.

■Features

All-metal construction allows baking at ≦200℃. By using a bellows in the drive part, it can be used up to ultra-high vacuum areas.

  • Product

    XY stage VB series

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1 Models of XY stage VB series

Image Part Number Price (excluding tax) Travel amount (mm) Connection flange Lifespan Leak amount Baking temperature
XY stage VB series-Part Number-VB70

VB70

Available upon quote

7.5

ICF70

10,000 times

2×10-11Pa・m3/sec or less

Maximum 200℃

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