XYZ Stage VB152XY-Z
Vacuum Products Co., Ltd.
About This Product
■Summary
Move in XYZ based on the base flange. Uses a high-precision micrometer, making positioning in vacuum easy.
■Features
All-metal construction allows baking at ≦200℃. By using a bellows in the drive part, it can be used up to ultra-high vacuum areas.
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Product
XYZ Stage VB152XY-Z
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Handling Company
Vacuum Products Co., Ltd.
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Categories
1 Models of XYZ Stage VB152XY-Z
| Product Image | Part Number | Price (excluding tax) | Amount of movement | Baking temperature | Connection flange fixed side | Connection flange moving side | Effective inner diameter | Leak amount | Lifespan | Repeatability | Scale | Spare port |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
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VB152XY-Z |
Available upon quote | XY: 7.5mm Z: 50mm | Maximum 200℃ | ICF152 | ICF70 | Φ36mm | 2×10-11Pa・m3/sec or less | 10,000 times | XY: 0.01mm or less Z: 0.05mm or less | XY: 0.001mm Z: 0.02mm | CF34×4 |
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