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  4. XYZ Stage VB152XY-Z (Vacuum Products Co., Ltd.)
XYZ Stage VB152XY-Z-VB152XY-Z
XYZ Stage VB152XY-Z-Vacuum Products Co., Ltd.

XYZ Stage VB152XY-Z
Vacuum Products Co., Ltd.

About This Product

■Summary

Move in XYZ based on the base flange. Uses a high-precision micrometer, making positioning in vacuum easy.

■Features

All-metal construction allows baking at ≦200℃. By using a bellows in the drive part, it can be used up to ultra-high vacuum areas.

  • Product

    XYZ Stage VB152XY-Z

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1 Models of XYZ Stage VB152XY-Z

Image Part Number Price (excluding tax) Repeatability Amount of movement Scale Effective inner diameter Connection flange moving side Connection flange fixed side Lifespan Spare port Leak amount Baking temperature
XYZ Stage VB152XY-Z-Part Number-VB152XY-Z

VB152XY-Z

Available upon quote

XY: 0.01mm or less Z: 0.05mm or less

XY: 7.5mm Z: 50mm

XY: 0.001mm Z: 0.02mm

Φ36mm

ICF70

ICF152

10,000 times

CF34×4

2×10-11Pa・m3/sec or less

Maximum 200℃

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Vacuum Products Co., Ltd.

  • Japan

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