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  2. Robots
  3. Robot Hands
  4. Robot hand development Wafer transfer SC type (Harmotech Co., Ltd.)
Robot hand development Wafer transfer SC type-SC type FORK Thin type
Robot hand development Wafer transfer SC type-Harmotech Co., Ltd.

Robot hand development Wafer transfer SC type
Harmotech Co., Ltd.

About This Product

■Supports the outer periphery of the wafer

Unlike a suction hand, it can handle the wafer surface without contacting it, so it is a fundamental solution to problems such as particle transfer.

■Applicable wafer example

Flat wafer with no warping.

■FORK Thin type

・Can be used as an end effector for robots ・Can access wafer cassettes ・Elimination of particle transfer to wafer ・Loading access to the wafer surface is possible ・Elimination of static electricity charge and peeling charge ・Reducing equipment takt time by centering during transportation

■CIRCLE Large area holding type

・Can be used as an end effector for robots ・Can be used as a chuck stage ・Stress-free for ultra-thin wafers ・Eliminates cracks and cracks when transporting ultra-thin wafers ・Available for coin stack type transport cases ・Elimination of particle transfer to wafer ・Loading access to the wafer surface is possible ・Elimination of static electricity charge and peeling charge ・Reducing equipment takt time by centering during transportation

■HOLDER manual tweezers type

・Manual tweezers for handling ultra-thin wafers ・Stress-free for wafers ・Suitable for small to large diameters ・Supports access to wafer cassettes

  • Product

    Robot hand development Wafer transfer SC type

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1 Models of Robot hand development Wafer transfer SC type

Image Part Number Price (excluding tax)
Robot hand development Wafer transfer SC type-Part Number-SC type FORK Thin type

SC type FORK Thin type

Available upon quote

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About Company Handling This Product

Harmotech Co., Ltd.

  • Japan

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